DocumentCode

330665

Title

Evaluation of Image Shortening Effects with Rectangular Array Patterns in X-Ray Lithography

Author

Mitsui, S. ; Tanaka, Y. ; Taguchi, T. ; Gomei, Y. ; Hisatsugu, T.

Author_Institution

Association of Super-Advanced Electronics Technologies (ASET)

fYear

1998

fDate

13-16 July 1998

Firstpage

119

Lastpage

120

Keywords

Chemicals; Electronics industry; Energy resolution; Industrial electronics; Laboratories; Resists; Silicon compounds; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730002

Filename

730002