Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays

Author

Franklin, Robert K. ; Johnson, Matthew D. ; Scott, Katharine A. ; Shim, Jun Ho ; Nam, Hakhyun ; Kipke, Daryl R. ; Brown, Richard B.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrO) quasi reference electrode for neurochemical recordings. The probes have a 1.5 times 10³ mum² IrO reference electrode, a 1.5 times 10³ mum² Pt counter electrode, three circular Pt working electrodes, and three circular IrO electrodes for electrical recording. Several different electrode sizes (4 to 50 mum radius) were fabricated in order to study the effects of electrode size. In vitro evaluation of the probes demonstrated close correlation between results obtained using a Ag/AgCl reference electrode and the on-chip IrO_x reference electrode

Keywords

biochemistry; biological techniques; biomedical electrodes; chemical sensors; iridium compounds; microelectrodes; neurophysiology; silver; silver compounds; Ag-AgCl; IrO; MEMS microelectrode arrays; iridium oxide reference electrodes; neurochemical recordings; neurochemical sensing; on-chip referenceelectrodes; quasi reference electrode; silicon neural probe; Biological materials; Boron; Counting circuits; Delamination; Electrodes; In vivo; Microelectrodes; Micromechanical devices; Probes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597971

Filename

1597971