DocumentCode :
330689
Title :
Fabrication Of InP Sub-micron Pillars For Two-dimensional Photonic Crystals By Reactive Ion Etching
Author :
Hatate, H. ; Hashimoto, M. ; Shirakawa, H. ; Fujiwara, Y. ; Takeda, Y. ; Nakano, H. ; Tatsuta, T. ; Tsuji, O.
Author_Institution :
Nagoya University
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
166
Lastpage :
167
Keywords :
Etching; Fabrication; Indium phosphide; Lattices; Optical resonators; Optical surface waves; Photonic band gap; Photonic crystals; Semiconductor laser arrays; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730026
Filename :
730026
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330689
