• DocumentCode
    330689
  • Title

    Fabrication Of InP Sub-micron Pillars For Two-dimensional Photonic Crystals By Reactive Ion Etching

  • Author

    Hatate, H. ; Hashimoto, M. ; Shirakawa, H. ; Fujiwara, Y. ; Takeda, Y. ; Nakano, H. ; Tatsuta, T. ; Tsuji, O.

  • Author_Institution
    Nagoya University
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    166
  • Lastpage
    167
  • Keywords
    Etching; Fabrication; Indium phosphide; Lattices; Optical resonators; Optical surface waves; Photonic band gap; Photonic crystals; Semiconductor laser arrays; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730026
  • Filename
    730026
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330689