Novel Fabrication Of Comb Drive Actuator Using RIE Of Polysilicon And [110] Si Anisotropic Bulk Etching In KOH

Author

Lim, Hyung-Taek ; Kim, Yong-Kweon

Author_Institution

Seoul National University

fYear

1998

fDate

13-16 July 1998

Firstpage

170

Lastpage

171

Keywords

Actuators; Anisotropic magnetoresistance; Electrodes; Fabrication; Fingers; Geometry; Passivation; Semiconductor films; Springs; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730028

Filename

730028

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