DocumentCode
330692
Title
The Vapor Phase Deposition Of Fluorocarbon Films For The Prevention Of In-Use Stiction In Micromirrors
Author
Lee, Sang-Ho ; Kwon, Myong-Jong ; Park, Jin-Goo ; Kim, Yong-Kweon ; Shin, Hyung-Jae
Author_Institution
Hanyang University
fYear
1998
fDate
13-16 July 1998
Firstpage
172
Lastpage
173
Keywords
Aluminum; Annealing; Fabrication; Goniometers; Micromechanical devices; Micromirrors; Organic chemicals; Plasma applications; Plasma chemistry; Plasma measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730029
Filename
730029
Link To Document