Title :
Fabrication Of Micro-Cantilever With A Silicon Probe Prepared By Anodization
Author :
Higa, Katsuya ; Asano, Tanemasa
Author_Institution :
Kyushu Institute of Technology
Keywords :
Atomic force microscopy; Current density; Fabrication; Gold; Morphology; Needles; Probes; Semiconductor films; Shape; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730032
