DocumentCode

330695

Title

Fabrication Of Micro-Cantilever With A Silicon Probe Prepared By Anodization

Author

Higa, Katsuya ; Asano, Tanemasa

Author_Institution

Kyushu Institute of Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

178

Lastpage

179

Keywords

Atomic force microscopy; Current density; Fabrication; Gold; Morphology; Needles; Probes; Semiconductor films; Shape; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730032

Filename

730032