Title :
A New Thermal Characterization Technique For Thermal Actuators Using A Frequency Response Analyzer
Author :
Lee, Jae-Youl ; Kang, Sang-Won
Author_Institution :
KAIST
Keywords :
Actuators; Capacitance; Equations; Equivalent circuits; Frequency response; Impedance; Microactuators; Temperature; Thermal conductivity; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730035
