Title :
Two-Input.axis Angular Rate Sensor
Author :
An, Seungdo ; Oh, Yongsoo ; Choi, Sang-on ; Song, Ci-Moo
Author_Institution :
Samsung Advanced Institute of Technology
Keywords :
Capacitance; Dry etching; Electrodes; Frequency; Gas detectors; Gyroscopes; Micromachining; Resonance; Torque; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730038
