Title :
Fabrication Of A Nanometer-Scale Si Wire By Micromachining Of A Silicon-on-Insulator Substrate
Author :
Fujii, H. ; Kanemaru, S. ; Hiroshima, H. ; Yokoyama, H. ; Itoh, J.
Author_Institution :
Electrotechnical Laboratory
Keywords :
Chemical sensors; Etching; Fabrication; Micromachining; Nanoscale devices; Nanostructures; Oxidation; Silicon on insulator technology; Surface emitting lasers; Wire;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730040
