Electrical Properties Of E-Beam Exposed Silicon Dioxides And Their Application To Nano-Devices
Author :
Choi, B.H. ; Jung, S.K. ; Kim, S.I. ; Hwang, S.W. ; Park, J.H. ; Kim, Y. ; Kim, E.K. ; Min, S.K.
Author_Institution :
Korea University
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
206
Lastpage :
207
Keywords :
Aluminum; Contamination; Current measurement; Electric variables measurement; Electrons; Fabrication; Pollution measurement; Power engineering and energy; Silicon; Spectroscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
