DocumentCode
330709
Title
Electrical Properties Of E-Beam Exposed Silicon Dioxides And Their Application To Nano-Devices
Author
Choi, B.H. ; Jung, S.K. ; Kim, S.I. ; Hwang, S.W. ; Park, J.H. ; Kim, Y. ; Kim, E.K. ; Min, S.K.
Author_Institution
Korea University
fYear
1998
fDate
13-16 July 1998
Firstpage
206
Lastpage
207
Keywords
Aluminum; Contamination; Current measurement; Electric variables measurement; Electrons; Fabrication; Pollution measurement; Power engineering and energy; Silicon; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730046
Filename
730046
Link To Document