GaAs(C)/InAs superlattices grown by MOMBE

Author

Abernathy, C.R. ; Wisk, P.W. ; Pearton, S.J. ; Hobson, W.S. ; Fuoss, P.H. ; Lamelas, F.J. ; Chu, S.N.G. ; Ren, F.

Author_Institution

AT&T Bell Lab., Murray Hill, NJ, USA

fYear

1992

fDate

21-24 April 1992

Firstpage

281

Lastpage

285

Abstract

Carbon is an attractive p-type dopant for III-V semiconductors due to its thermal stability relative to Be or Zn. However, it has been shown to activate as an acceptor rather poorly in In/sub 0.53/Ga/sub 0.47/As due to the relative weakness of the In-C bond. One method for overcoming this problem is growth of short-period GaAs(C)/InAs superlattices in which carbon is introduced only in the GaAs and the InAs is left nominally undoped. Using this approach, the authors have achieved hole concentrations up to 7*10/sup 19/ cm/sup -3/ with hole mobilities of 20 cm/sup 2/-V/sup -1/ sec/sup -1/. Such structures are stable against rapid thermal annealing (10 s) up to 750 degrees C. The surface morphologies are specular even for very thick (0.95 mu m) layers, and remain so even after annealing at 750 degrees C. Because of the high carrier concentration and good thermal stability, these structures show great promise for applications to InP-based lasers and heterojunction bipolar transistors.<>

Keywords

Hall effect; III-V semiconductors; X-ray diffraction examination of materials; carbon; carrier density; carrier mobility; chemical beam epitaxial growth; gallium arsenide; heterojunction bipolar transistors; indium compounds; semiconductor growth; semiconductor superlattices; surface structure; transmission electron microscope examination of materials; 0.95 micron; 750 degC; Hall measurements; III-V semiconductors; InAs-GaAs:C; InP-based lasers; MOMBE; heterojunction bipolar transistors; hole concentrations; hole mobilities; p-type dopant; rapid thermal annealing; superlattices; surface morphologies; thermal stability; Bonding; Gallium arsenide; III-V semiconductor materials; Laser applications; Laser stability; Rapid thermal annealing; Semiconductor superlattices; Surface morphology; Thermal stability; Zinc;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1992., Fourth International Conference on

Conference_Location

Newport, RI, USA

Print_ISBN

0-7803-0522-1

Type

conf

DOI

10.1109/ICIPRM.1992.235585

Filename

235585