DocumentCode :
330710
Title :
Study On Microdefect Characteristics Analysis By RTA in 1MeV P Ion Implantation for High Memory Devices
Author :
Roh, Byeong-Gyu ; Kang, Hee-Won ; Cho, So-Haeng ; Hong, Sung-Pyo ; Eum, Keom-Yong ; Oh, Hwan-Sool
Author_Institution :
Kon-Kuk University
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
208
Lastpage :
209
Keywords :
Analytical models; Fabrication; Furnaces; Ion implantation; Mass spectroscopy; Optimization methods; Simulated annealing; Temperature distribution; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730047
Filename :
730047
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330710
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