A thermal evolution study of argon and nitrogen incorporation in bias-sputtered Co-Cr films

Author

Mapps, D.J. ; Mahvan, N. ; Akhter, M.A.

Author_Institution

Plymouth Polytechnic

fYear

1989

fDate

28-31 March 1989

Keywords

Argon; Chemicals; Magnetic films; Magnetic properties; Nitrogen; Sputtering; Substrates; Thermal engineering; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1989. Digests of INTERMAG '89., International

Conference_Location

Washington, DC, USA

Type

DOI

10.1109/INTMAG.1989.690346

Filename

690346

Link To Document