Title :
A thermal evolution study of argon and nitrogen incorporation in bias-sputtered Co-Cr films
Author :
Mapps, D.J. ; Mahvan, N. ; Akhter, M.A.
Author_Institution :
Plymouth Polytechnic
Keywords :
Argon; Chemicals; Magnetic films; Magnetic properties; Nitrogen; Sputtering; Substrates; Thermal engineering; Voltage;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690346
