مرکز منطقه ای اطلاع رساني علوم و فناوري - A Study On The High Temperture Platinum Etching

DocumentCode :

330715

Title :

A Study On The High Temperture Platinum Etching

Author :

Kim, Hyounwoo ; Ju, Byongsun ; Nam, Beongyoon ; Yoo, Wonjong ; Kang, Changjin ; Moon, Jootae ; Lee, Moonyong

Author_Institution :

Samsung Electronics

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

219

Lastpage :

220

Keywords :

Binary search trees; Bonding; Electrodes; Etching; Moon; Plasma applications; Plasma temperature; Platinum; Research and development; Tin;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.730053

Filename :

730053

Link To Document :