DocumentCode

330715

Title

A Study On The High Temperture Platinum Etching

Author

Kim, Hyounwoo ; Ju, Byongsun ; Nam, Beongyoon ; Yoo, Wonjong ; Kang, Changjin ; Moon, Jootae ; Lee, Moonyong

Author_Institution

Samsung Electronics

fYear

1998

fDate

13-16 July 1998

Firstpage

219

Lastpage

220

Keywords

Binary search trees; Bonding; Electrodes; Etching; Moon; Plasma applications; Plasma temperature; Platinum; Research and development; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730053

Filename

730053