Tin Oxide Films Deposited By Ozone Assisted Thermal CVD

Author

Bae, J.W. ; Yeom, G.Y. ; Lee, S.W. ; Song, K.H. ; Park, J.I. ; Park, K.J.

Author_Institution

Sung Kyun Kwan University

fYear

1998

fDate

13-16 July 1998

Firstpage

237

Lastpage

239

Keywords

Chemical vapor deposition; Conductive films; Conductivity; Conductors; Electrons; Optical films; Stability; Substrates; Temperature control; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730060

Filename

730060

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