Title :
Tin Oxide Films Deposited By Ozone Assisted Thermal CVD
Author :
Bae, J.W. ; Yeom, G.Y. ; Lee, S.W. ; Song, K.H. ; Park, J.I. ; Park, K.J.
Author_Institution :
Sung Kyun Kwan University
Keywords :
Chemical vapor deposition; Conductive films; Conductivity; Conductors; Electrons; Optical films; Stability; Substrates; Temperature control; Tin;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730060
