Title :
A Study On The Deposition Of a-Si:H Films For High Photoconductivity
Author :
Kang, Moonsang ; Koo, Yongseo ; An, Chul
Author_Institution :
Induk Institute of Technology
Keywords :
Bonding; Conductivity; Hydrogen; Optical films; Photoconductivity; Photonic band gap; Plasma chemistry; Plasma density; Plasma properties; Plasma temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730064
