DocumentCode

330729

Title

Controllability Of Dopant Ion Number In Single Ion Implantation

Author

Shinada, Takahiro ; Matsukawa, Takashi ; Ohdornari, I.

Author_Institution

Waseda University

fYear

1998

fDate

13-16 July 1998

Firstpage

253

Lastpage

254

Keywords

Annealing; Atomic measurements; Controllability; Electrons; Fluctuations; Implants; Ion beams; Ion implantation; Neutron spin echo; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730067

Filename

730067