Title :
Deposition And Patterning Technique For Realization Of PZT Thick Film Micro Actuator
Author :
Maeda, Ryutaro ; Chu, J. ; Schroth, A. ; Akedo, J. ; Ichiki, M. ; Wang, Z. ; Yonekubo, S.
Author_Institution :
Division Surface and Interface Technology, Mechanical Engineering Laboratory
Keywords :
Electromechanical systems; Fabrication; Mechanical engineering; Microactuators; Performance evaluation; Residual stresses; Structural beams; Thick films; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730068
