DocumentCode :
330731
Title :
New HF Linear Ion Source For Industrial Applications
Author :
Seok-Keun Koh ; Won-Kook Choi ; Hyung-Jin Jung ; Bougrov, G. ; Kralkina, E. ; Kondranin, S. ; Pavlov, V.
Author_Institution :
Korea Institute of Science and Technology
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
256
Lastpage :
256
Keywords :
Acceleration; Chemical technology; Discharges; Electrodes; Electrostatics; Ion beams; Ion sources; Materials science and technology; Optical surface waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.730069
Filename :
730069
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330731
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