• DocumentCode
    330737
  • Title

    Analysis Of High-Acceleration SEM Images

  • Author

    Moniwa, Akemi ; Terasawa, Tsuneo

  • Author_Institution
    Central Research Laboratory, Hitachi Ltd.
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    267
  • Lastpage
    268
  • Keywords
    Acceleration; Charge carrier processes; Electron traps; Energy loss; Image analysis; Laboratories; Scanning electron microscopy; Scattering; Surface topography; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730075
  • Filename
    730075
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330737