Title :
Analysis Of High-Acceleration SEM Images
Author :
Moniwa, Akemi ; Terasawa, Tsuneo
Author_Institution :
Central Research Laboratory, Hitachi Ltd.
Keywords :
Acceleration; Charge carrier processes; Electron traps; Energy loss; Image analysis; Laboratories; Scanning electron microscopy; Scattering; Surface topography; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730075
