• DocumentCode
    330741
  • Title

    Microprobe Analysis Of Pt Films Deposited By Beam Induced Reaction

  • Author

    Park, W.K. ; Nagai, T. ; Takai, M. ; Lehrer, C. ; Frey, L. ; Ryssel, H.

  • Author_Institution
    Osaka University
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    275
  • Lastpage
    276
  • Keywords
    Atomic beams; Atomic layer deposition; Contamination; Electron beams; Focusing; Ion beams; Lithography; Materials science and technology; Platinum; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.730079
  • Filename
    730079
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330741