Microprobe Analysis Of Pt Films Deposited By Beam Induced Reaction
Author :
Park, W.K. ; Nagai, T. ; Takai, M. ; Lehrer, C. ; Frey, L. ; Ryssel, H.
Author_Institution :
Osaka University
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
275
Lastpage :
276
Keywords :
Atomic beams; Atomic layer deposition; Contamination; Electron beams; Focusing; Ion beams; Lithography; Materials science and technology; Platinum; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
