DocumentCode

330742

Title

Voltage Modulation Scanned Probe Oxidation

Author

Dagata, J.A. ; Inoue, T. ; Itoh, J. ; Matsumoto, K. ; Yokoyama, H.

Author_Institution

National Institute of Standards and Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

277

Lastpage

278

Keywords

Capacitance; Doping; Fabrication; Frequency; Oxidation; Scanning probe microscopy; Silicon; Surface topography; Titanium; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730080

Filename

730080