Title :
Voltage Modulation Scanned Probe Oxidation
Author :
Dagata, J.A. ; Inoue, T. ; Itoh, J. ; Matsumoto, K. ; Yokoyama, H.
Author_Institution :
National Institute of Standards and Technology
Keywords :
Capacitance; Doping; Fabrication; Frequency; Oxidation; Scanning probe microscopy; Silicon; Surface topography; Titanium; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730080
