مرکز منطقه ای اطلاع رساني علوم و فناوري - Nanofabrication Using Scanning Near-Field Optical Microscopy

DocumentCode :

330743

Title :

Nanofabrication Using Scanning Near-Field Optical Microscopy

Author :

Mitsuoka, Y. ; Nakajima, K. ; Chiba, N. ; Muramatsu, H. ; Ataka, T.

Author_Institution :

Seiko Instruments Inc.

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

279

Lastpage :

280

Keywords :

Apertures; Atom optics; Atomic force microscopy; Lithography; Nanofabrication; Optical films; Optical microscopy; Optical sensors; Probes; Resists;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.730081

Filename :

730081

Link To Document :