DocumentCode

330744

Title

STM Study Of Silicide Structure On Si [110] Surface

Author

Ono, Izumi ; Yoshimura, Masamichi ; Ueda, Kazuyuki

Author_Institution

Toyota Technological Institute

fYear

1998

fDate

13-16 July 1998

Firstpage

281

Lastpage

282

Keywords

Heating; Lattices; Pressure measurement; Scanning electron microscopy; Shape; Silicides; Substrates; Temperature; Tunneling; Vacuum systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730082

Filename

730082