Title :
STM Study Of Silicide Structure On Si [110] Surface
Author :
Ono, Izumi ; Yoshimura, Masamichi ; Ueda, Kazuyuki
Author_Institution :
Toyota Technological Institute
Keywords :
Heating; Lattices; Pressure measurement; Scanning electron microscopy; Shape; Silicides; Substrates; Temperature; Tunneling; Vacuum systems;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730082
