Title :
Electron-Beam-Induced Deposition For Nanodevice Formation
Author_Institution :
Electrotechnical Laboratory
Keywords :
Capacitance; Controllability; Electrodes; Electrons; Etching; Nanoscale devices; Substrates;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730085
