Atomic-Step-Networks For Nanopatterning On Si Surfaces

Author

Ogino, T. ; Homma, Y. ; Hibino, H. ; Kunii, Y. ; Omi, H.

Author_Institution

Nippon Telegraph and Telephone Corporation

fYear

1998

fDate

13-16 July 1998

Firstpage

296

Lastpage

296

Keywords

Annealing; Atomic layer deposition; Furnaces; Motion control; Nanopatterning; Nanostructures; Quantum dots; Telegraphy; Telephony;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730089

Filename

730089

Link To Document