Synthesis And Characterization Of Alicyclic Polymers With Hydrophilic Groups For 193-nm Single-Layer Resist

Author

Jung, Min-Ho ; Jung, Jae-Chang ; Bok, Cheol-Kyu ; Balk, K.

Author_Institution

Hyundai Electronics Industries Co., Ltd.

fYear

1998

fDate

13-16 July 1998

Firstpage

321

Lastpage

322

Keywords

Adhesives; Biomembranes; Dry etching; Electronics industry; Finishing; Lithography; Polymer gels; Resins; Resists; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.730102

Filename

730102

Link To Document