Title :
Synthesis And Characterization Of Alicyclic Polymers With Hydrophilic Groups For 193-nm Single-Layer Resist
Author :
Jung, Min-Ho ; Jung, Jae-Chang ; Bok, Cheol-Kyu ; Balk, K.
Author_Institution :
Hyundai Electronics Industries Co., Ltd.
Keywords :
Adhesives; Biomembranes; Dry etching; Electronics industry; Finishing; Lithography; Polymer gels; Resins; Resists; Spectroscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.730102
