Title :
Interactive device structure generation system -GCOS- for Coupled 3D process/device simulations
Author :
Kajitani, H. ; Shimizu, N. ; Fukuda, K. ; Baba, S. ; Nishi, K. ; Ueda, J.
Author_Institution :
OKI Electric Industry Co., Ltd.
fDate :
31 May-1 Jun 1992
Keywords :
Analytical models; Boundary conditions; Graphics; Impurities; Libraries; Mesh generation; Mice; P-n junctions; Saturn; Shape;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.674113
