مرکز منطقه ای اطلاع رساني علوم و فناوري - Step & Scan Lithography For Mass Production Applications

DocumentCode :

330770

Title :

Step & Scan Lithography For Mass Production Applications

Author :

Arnold, B. ; Koek, B. ; de Zwart, G. ; Luehrmann, P. ; Jenkins, P.

Author_Institution :

ASM Lithography BV

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

335

Lastpage :

335

Keywords :

Apertures; Lighting; Lithography; Mass production; Optical imaging; Productivity;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.730109

Filename :

730109

Link To Document :