Title :
Capacitive detection in thin film chemical sensors and biosensors
Author :
Rehacek, V. ; Novotny, I. ; Tvarozek, V. ; Riepl, M. ; Hirsch, T. ; Mass, M. ; Schweiss, R. ; Mirsky, V.M. ; Wolfbeis, O.S.
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
Thin film electrode chips on silicon substrate have been realized and utilized in development of different chemo- and biosensors. These affinity sensors are based on capacitive transducing and their general structure is thin film Au/alkanethiol/receptor. Several applications of thin film gold electrodes in capacitive sensors are presented
Keywords :
biosensors; capacitive sensors; chemical sensors; electrodes; gold; thin film devices; Au; Au/alkanethiol/receptor structure; Si; affinity sensor; biosensor; capacitive detection; chemical sensor; silicon substrate; thin film electrode chip; Biosensors; Capacitive sensors; Chemical and biological sensors; Chemical sensors; Electrodes; Gold; Semiconductor thin films; Silicon; Substrates; Thin film sensors;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
0-7803-4909-1
DOI :
10.1109/ASDAM.1998.730212
