Title :
Vacuum deposition of Co-Cr perpendicular anisotropy films on polymer substrates treated with ion beam
Author :
Sugita, R. ; Tohma, K. ; Honda, K. ; Kawawake, Y. ; Echigo, N. ; Murakami, Y.
Author_Institution :
Matsushita Electric Ind. Co., Ltd.
Keywords :
Anisotropic magnetoresistance; Glow discharges; Human computer interaction; Ion beams; Polyimides; Polymer films; Substrates; Surface contamination; Surface treatment; Voltage;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690352