DocumentCode
330969
Title
Diamond microstructures
Author
Hjort, K.
Author_Institution
Dept. of Mater. Sci., Uppsala Univ., Sweden
Volume
1
fYear
1998
fDate
6-10 Oct 1998
Firstpage
57
Abstract
Synthetic polycrystalline diamond microstructuring and microstructures are presented. A short review are made on the research up to today with an emphasis on the recent research at the Angstrom Laboratory, Uppsala University. It is concluded that microstructures for field emitting, microfluidic, and moulds for metallic microreplication are closest to commercialization. Much research are still needed for low-cost microstructures in diamond
Keywords
diamond; micromachining; C; field emitter; metallic microreplication; microfluidic device; microsystem technology; mould; synthetic polycrystalline diamond microstructure; Chemical technology; Conducting materials; Crystalline materials; Crystallization; Microstructure; Optical films; Optical refraction; Optical saturation; Semiconductor materials; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location
Sinaia
Print_ISBN
0-7803-4432-4
Type
conf
DOI
10.1109/SMICND.1998.732277
Filename
732277
Link To Document