The inversion-law in MEMS microstrip array antenna manufacturing

Author

Huanhui Chen ; Xiaoming Liu ; Quan Hong ; Zhenlei Deng ; Yefei Li ; Xue Zhao ; Zhonggan Zhu

Author_Institution

Sch. of Mechatron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2013

fDate

4-7 Aug. 2013

Firstpage

169

Lastpage

173

Abstract

In the microwave system it is very important to the manufacture of MEMS microstrip array antennas, microstrip array antenna´s geometrical parameters are closely related to its electrical parameters. In the manufacturing process of MEMS, it is very difficult to measure the geometry parameters. However, currently it is easy to test the electrical parameters of microwave systems. The real geometry parameters of the microstrip array antenna were obtained through the simulation results of HFSS software and the testing results of microstrip array antenna´s electrical parameters. The geometrical dimension error of the microstrip antenna´s structure is determined. In this paper, according to the analysis and test results of C-band microstrip array antenna, the inversion law in the microstrip array antenna manufacturing is obtained.

Keywords

microfabrication; micromechanical devices; microstrip antenna arrays; HFSS software; MEMS C-band microstrip array antenna manufacturing; geometrical dimension error; inversion law; microwave systems; Arrays; Manufacturing; Micromechanical devices; Microstrip; Microstrip antenna arrays; Microstrip antennas; MEMS inversion-law; Microstrip array antenna;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2013 IEEE International Conference on

Conference_Location

Takamatsu

Print_ISBN

978-1-4673-5557-5

Type

conf

DOI

10.1109/ICMA.2013.6617912

Filename

6617912