Title :
Bi-objective schedule control of batch processes in semiconductor manufacturing
Author :
Ganesan, Viswanath Kumar ; Gupta, Amit Kumar ; Iyer, Sivakumar Appa
Author_Institution :
Singapore-MIT Alliance, Singapore
Abstract :
This paper presents the concept of schedule control using two contradicting objectives in dynamic scheduling of backend batch processes in a semiconductor industry. A convex combination approach is presented to achieve the desired level of control in dynamic scheduling considering the two contradicting objectives, viz., the mean cycle time and the maximum tardiness. At each decision instance during simulation, an appropriate job referred as pareto-job is selected using the convex combination approach and loaded on the machine for processing. We demonstrate using simulation experiments the concept of schedule control, and show how a batch processing machine can be controlled at specified operating conditions (scheduling objectives) dictated by the market requirements.
Keywords :
batch processing (industrial); convex programming; dynamic scheduling; semiconductor device manufacture; batch processes control; biobjective schedule control; convex combination approach; dynamic scheduling; maximum tardiness; mean cycle time; semiconductor manufacturing; Dynamic scheduling; Fabrication; Heuristic algorithms; Job shop scheduling; Manufacturing processes; Ovens; Process control; Semiconductor device manufacture; Semiconductor device modeling; Testing;
Conference_Titel :
Robotics, Automation and Mechatronics, 2004 IEEE Conference on
Print_ISBN :
0-7803-8645-0
DOI :
10.1109/RAMECH.2004.1438069