DocumentCode :
3314151
Title :
Fabrication of graphene devices, issues and prospects
Author :
Deligeorgis, G. ; Konstantinidis, G. ; Dragoman, M. ; Plana, R.
Author_Institution :
LAAS CNRS, Toulouse, France
Volume :
01
fYear :
2010
fDate :
11-13 Oct. 2010
Firstpage :
21
Lastpage :
25
Abstract :
Graphene based devices have seen an enormous amount of published literature since its isolation 6 years ago, however processing issues and wafer size material availability have proven to be the most demanding tasks in fabrication of graphene devices. This work focuses on some of the main technological issues relating to realization of graphene based devices. Solutions and current techniques are shortly presented and discussed.
Keywords :
graphene; molecular electronics; C; graphene devices; processing issues; technological issues; wafer size material availability; Carbon; Dielectrics; Metals; Photonic band gap; Silicon carbide; Substrates; device processing; electronic devices; graphene; nanoelectornics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
ISSN :
1545-827X
Print_ISBN :
978-1-4244-5783-0
Type :
conf
DOI :
10.1109/SMICND.2010.5650325
Filename :
5650325
Link To Document :
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