Title :
Fabrication of graphene devices, issues and prospects
Author :
Deligeorgis, G. ; Konstantinidis, G. ; Dragoman, M. ; Plana, R.
Author_Institution :
LAAS CNRS, Toulouse, France
Abstract :
Graphene based devices have seen an enormous amount of published literature since its isolation 6 years ago, however processing issues and wafer size material availability have proven to be the most demanding tasks in fabrication of graphene devices. This work focuses on some of the main technological issues relating to realization of graphene based devices. Solutions and current techniques are shortly presented and discussed.
Keywords :
graphene; molecular electronics; C; graphene devices; processing issues; technological issues; wafer size material availability; Carbon; Dielectrics; Metals; Photonic band gap; Silicon carbide; Substrates; device processing; electronic devices; graphene; nanoelectornics;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650325