DocumentCode
3314151
Title
Fabrication of graphene devices, issues and prospects
Author
Deligeorgis, G. ; Konstantinidis, G. ; Dragoman, M. ; Plana, R.
Author_Institution
LAAS CNRS, Toulouse, France
Volume
01
fYear
2010
fDate
11-13 Oct. 2010
Firstpage
21
Lastpage
25
Abstract
Graphene based devices have seen an enormous amount of published literature since its isolation 6 years ago, however processing issues and wafer size material availability have proven to be the most demanding tasks in fabrication of graphene devices. This work focuses on some of the main technological issues relating to realization of graphene based devices. Solutions and current techniques are shortly presented and discussed.
Keywords
graphene; molecular electronics; C; graphene devices; processing issues; technological issues; wafer size material availability; Carbon; Dielectrics; Metals; Photonic band gap; Silicon carbide; Substrates; device processing; electronic devices; graphene; nanoelectornics;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2010 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-5783-0
Type
conf
DOI
10.1109/SMICND.2010.5650325
Filename
5650325
Link To Document