Semiconductor sensors for the gas medium composition control

Author

Anisimov, O.V. ; Maximova, N.K. ; Filonov, N.G. ; Chernikov, E.V.

Author_Institution

Siberian Phys. & Tech. Inst., Tomsk, Russia

fYear

2003

fDate

7-11 April 2003

Firstpage

84

Lastpage

85

Abstract

This paper describes a semiconductor gas sensor and a portable device for the simultaneous determination of the composition of three gas components. The device consists of a gas chamber and an electron device, which includes a measurement module, microprocessor block and an indicator. The device can be used in control systems for emergency prevention in metal mining industry and chemical, oil and gas production and reprocessing enterprises as well as in servicing oil trunk pipelines and in ecological monitoring of the environment.

Keywords

MIS devices; gas sensors; semiconductor devices; thin film devices; electron device; gas chamber; gas medium composition control; gas molecule detection; natural gas; semiconductor gas sensors; sensors manufacturing; thin-film metal-oxide semiconductors; Chemical industry; Chemical products; Control systems; Electron devices; Gas detectors; Microprocessors; Mining industry; Petroleum; Pipelines; Production systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Modern Techniques and Technologies, 2003. MTT 2003. Proceedings of the 9th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists

Conference_Location

Tomsk

Print_ISBN

0-7803-7669-2

Type

conf

DOI

10.1109/SPCMTT.2003.1438141

Filename

1438141