Title :
Semiconductor sensors for the gas medium composition control
Author :
Anisimov, O.V. ; Maximova, N.K. ; Filonov, N.G. ; Chernikov, E.V.
Author_Institution :
Siberian Phys. & Tech. Inst., Tomsk, Russia
Abstract :
This paper describes a semiconductor gas sensor and a portable device for the simultaneous determination of the composition of three gas components. The device consists of a gas chamber and an electron device, which includes a measurement module, microprocessor block and an indicator. The device can be used in control systems for emergency prevention in metal mining industry and chemical, oil and gas production and reprocessing enterprises as well as in servicing oil trunk pipelines and in ecological monitoring of the environment.
Keywords :
MIS devices; gas sensors; semiconductor devices; thin film devices; electron device; gas chamber; gas medium composition control; gas molecule detection; natural gas; semiconductor gas sensors; sensors manufacturing; thin-film metal-oxide semiconductors; Chemical industry; Chemical products; Control systems; Electron devices; Gas detectors; Microprocessors; Mining industry; Petroleum; Pipelines; Production systems;
Conference_Titel :
Modern Techniques and Technologies, 2003. MTT 2003. Proceedings of the 9th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists
Conference_Location :
Tomsk
Print_ISBN :
0-7803-7669-2
DOI :
10.1109/SPCMTT.2003.1438141
