Title :
A temperature compensation algorithm of piezoresistive pressure sensor and software implementation
Author :
Dacheng Xu ; Yongtao Liu
Author_Institution :
Dept. of Micro-nano Sensor, Univ. of Soochow, Suzhou, China
Abstract :
The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor plays a great role in the total error, so how to make this kind of error get effective compensation is significant for its performance. It is an effective method that establishing high-order temperature compensation model for silicon piezoresistive sensors and compensating temperature error, and put forward a fitting coefficient adjustment method on this model basis. The paper has been realized the calculation of temperature compensation by Matlab GUI. Experimental results show that nonlinearity error is less than 0.4% F.S.
Keywords :
compensation; mathematics computing; piezoelectric transducers; pressure sensors; Matlab GUI; nonlinearity error; piezoresistive pressure sensor; software implementation; temperature compensation algorithm; thermal sensitivity drift; thermal zero drift; Fitting; Mathematical model; Piezoresistance; Software; Temperature distribution; Temperature sensors; algorithm; piezoresistive pressure sensor; temperature compensation coefficient;
Conference_Titel :
Mechatronics and Automation (ICMA), 2013 IEEE International Conference on
Conference_Location :
Takamatsu
Print_ISBN :
978-1-4673-5557-5
DOI :
10.1109/ICMA.2013.6618178
