Title :
Electrical potential distribution in magnetron discharge gap of the direct current
Author :
Zhukov, V.V. ; Krivobokov, V.V. ; Patsevich, V.V. ; Yanin, S.N.
Author_Institution :
Nucl. Phys. Inst., Tomsk Polytech. Univ., Tomsk
Abstract :
In the given paper discharge processes in magnetron of the direct current are considered and the results of the experiments on investigating potential distribution near the target are described
Keywords :
discharges (electric); electric potential; magnetrons; direct current; electric potential distribution; magnetron discharge gap; Anodes; Cathodes; Diodes; Electric potential; Electrons; Magnetic fields; Magnetic materials; Plasmas; Space charge; Spraying;
Conference_Titel :
Modern Techniques and Technologies, 2003. MTT 2003. Proceedings of the 9th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists
Conference_Location :
Tomsk
Print_ISBN :
0-7803-7669-2
DOI :
10.1109/SPCMTT.2003.1438212
