A study of field emission microtriodes

Author

Holland, C.E. ; Rosengreen, A. ; Spindt, C.A.

Author_Institution

SRI Int., Menlo Park, CA, USA

fYear

1990

fDate

9-12 Dec. 1990

Firstpage

979

Lastpage

982

Abstract

Structures simulating field emission microtriodes using Spindt-type molybdenum field emission cathodes have been successfully fabricated and tested. The key triode performance parameters-transconductance, input gate capacitance, transit time, anode voltage, and anode power-are investigated. Triodes with the anode located farther than 5 mm from the cathode are limited by the high voltage and power required to keep the transit time down. Close-spaced triodes with cathode to anode space in the range of 2-20 mu m have a transit time of 4*10/sup -12/ s at 60 V; however, an optimum anode fabrication is still required. Overall, a transconductance of 0.5 mS (5 mu S/emitter) and cutoff frequency of 0.8 MHz have demonstrated. A cathode geometry is proposed which would limit the input gate capacitance to less than 0.07 pF/mm.<>

Keywords

capacitance; cathodes; electron field emission; triodes; vacuum microelectronics; 0.5 mS; 0.8 MHz; Mo; Spindt-type; anode power; anode voltage; cathode geometry; cutoff frequency; field emission cathodes; field emission microtriodes; input gate capacitance; transconductance; transit time; Anodes; Capacitance; Cathodes; Cutoff frequency; Fabrication; Geometry; Testing; Transconductance; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1990. IEDM '90. Technical Digest., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Type

conf

DOI

10.1109/IEDM.1990.237076

Filename

237076