Title :
Preliminary results on the use of LIGA in an optoelectronics application
Author :
Collins, J.V. ; Pabla, A.S. ; Ford, C.W.
Author_Institution :
British Telecom Res. Labs., Ipswich, UK
Abstract :
LIGA (German acronym of lithographie, galvanoformung (plating) and abformung (forming)) is a relatively new technology which offers a potential means of realising very accurate (sub-micron) and high aspect ratio structures. In this paper we show the application of the LIGA process to optoelectronic assembly applications
Keywords :
LIGA; integrated optoelectronics; measurement errors; optical fabrication; photoresists; German acronym; LIGA optoelectronics application; LIGA process; abformung; forming; galvanoformung; lithographie; optoelectronic assembly applications; plating; very accurate sub-micron high aspect ratio structures; Assembly; Glass; Laboratories; Lenses; Optical devices; Optical fiber devices; Optical fibers; Optical pumping; Resists; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.737723
