DocumentCode
331843
Title
Preliminary results on the use of LIGA in an optoelectronics application
Author
Collins, J.V. ; Pabla, A.S. ; Ford, C.W.
Author_Institution
British Telecom Res. Labs., Ipswich, UK
Volume
1
fYear
1998
fDate
1-4 Dec 1998
Firstpage
42
Abstract
LIGA (German acronym of lithographie, galvanoformung (plating) and abformung (forming)) is a relatively new technology which offers a potential means of realising very accurate (sub-micron) and high aspect ratio structures. In this paper we show the application of the LIGA process to optoelectronic assembly applications
Keywords
LIGA; integrated optoelectronics; measurement errors; optical fabrication; photoresists; German acronym; LIGA optoelectronics application; LIGA process; abformung; forming; galvanoformung; lithographie; optoelectronic assembly applications; plating; very accurate sub-micron high aspect ratio structures; Assembly; Glass; Laboratories; Lenses; Optical devices; Optical fiber devices; Optical fibers; Optical pumping; Resists; Stimulated emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location
Orlando, FL
Print_ISBN
0-7803-4947-4
Type
conf
DOI
10.1109/LEOS.1998.737723
Filename
737723
Link To Document