Title :
Nonlithographic semiconductor nanoscale devices
Author :
Das, Biswajit A.
Author_Institution :
Lane Dept. of Comput. Sci. & Electr. Eng., West Virginia Univ., Morgantown, WV, USA
Abstract :
Summary form only given. We have developed a thin film template based nanostructure synthesis technique that is applicable for the development of high performance electronic and photonic devices on silicon, glass and other planar substrates. The technique is based on the anodization of a thin film of aluminum to form an alumina template;. synthesizing the active material inside these nanoscale pores then forms the nanostructures. We are currently using the above template-based technology for the fabrication of a variety of devices including (i) nanostructure-based solar cells, (ii) narrowband optical detectors, (iii) electro-optic modulators and (iv) Coulomb-blockade devices
Keywords :
Coulomb blockade; anodisation; electro-optical modulation; nanotechnology; photodetectors; solar cells; Al2O3; Coulomb-blockade devices; anodization; electro-optic modulators; nanoscale pores; nanostructure synthesis; narrowband optical detectors; nonlithographic process; photonic devices; semiconductor nanoscale devices; solar cells; template-based technology; Aluminum; Glass; Nanoscale devices; Nanostructured materials; Optical device fabrication; Optical materials; Semiconductor thin films; Silicon; Substrates; Thin film devices;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939125