Numerical modeling of silicon sensor of low heat flow base on profile membrane

Sensor development of thermoelectrical type based on Si-Al thermocouples, measuring heat flows of low level, made using microelectronic technology is presented. The main idea of measurement is that heat flow falls in the sensitive area, on the periphery, but the center is in free convection conditions. Heat sink with other parts is absent due to a fluoroplastic case, so a temperatures gradient appears in the sensor. Profile membrane was taken as a base of the sensor. Presence of a thin part promotes an increasing heat resistance and, as an effect, arises a greater difference of temperatures, which will be transformed in the electrical signal