Fabrication and design of Diffractive Optical layer applied to Resonant Cavity LED

To optical packaging cost and enhance alignment accuracy, a new application strategy of Diffractive Optical Element (DOE) had been proposed to develop a new technology that can integrate DOE and Resonant Cavity LED (RCLED) in semiconductor manufacture processing. The passivation layer SiO₂ used to fabricate the integrated DOE of Dammann Grating. Applied scalar diffraction principle through using G-solver software, Binary Phase Fourier Grating (B.P.F.G.) was designed to control the spatial distribution of emitted light energy along LED surface through adjusting geometric shape and depth of grates. Confirming several B.P.F.G. designs by measuring outcome light distributions, such DOE had been successfully manufactured directly on LED wafers.