Title :
Microinductor from high-Tc ceramic YBa2Cu3O6+X on a substrate from Al2O3
Author :
Kvasov, Sergey B. ; Firsov, Nikolay I. ; Novikov, Ilya L.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., NSTU, Russia
Abstract :
In this work the experimental results obtained in a way of preparing process of new circuit-components based on high-Tc ceramic are represented. The method of transposition of a microcontour of inductance from ceramics YBa2Cu3O7-x on a substrate from Al2O3 is discussed. Such of microinductance is planned later to use as highly sensitive sensors of electro-magnetic oscillations of high selectivity with magnitude of Q-factor of the order 104
Keywords :
Q-factor; barium compounds; high-temperature superconductors; inductors; superconducting devices; yttrium compounds; Al2O3; Al2O3 substrate; Q-factor; YBa2Cu3O6+X thick film; YBa2Cu3O6; circuit component; electromagnetic oscillation sensor; high-Tc ceramic superconductor; microinductor; preparation process; Ceramics; Degradation; Filters; Hafnium; Integrated circuit technology; Microelectronics; Q factor; Silicon; Spirals; Substrates;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939167