Title :
Elastic properties and vibration of micro-machined structures subject to residual stresses
Author :
Wylde, J. ; Hubbard, T.J.
Author_Institution :
Dept. of Mech. Eng., Dalhousie Univ., Halifax, NS, Canada
Abstract :
This paper presents a theoretical derivation of the changes in resonant frequencies for micro-machined beams due to residual stress. It was found that the frequency increases with increasing strain: the change in the square of the frequency was proportional to the strain, and long slender beams show larger frequency changes. A method for determining Young´s Modulus and strain from multiple frequency measurements is presented. The results are compared both to FEM analysis, as well as to experimental results from the literature.
Keywords :
Young´s modulus; internal stresses; micromachining; vibrations; Young´s modulus; elastic properties; micromachined beam; residual stress; resonant frequency; strain; vibration; Capacitive sensors; Differential equations; Frequency measurement; Manufacturing; Mechanical engineering; Residual stresses; Resonance; Resonant frequency; Strain measurement; Vibrations;
Conference_Titel :
Electrical and Computer Engineering, 1999 IEEE Canadian Conference on
Conference_Location :
Edmonton, Alberta, Canada
Print_ISBN :
0-7803-5579-2
DOI :
10.1109/CCECE.1999.804969
