• DocumentCode
    331968
  • Title

    All solid-state, single-frequency 193-nm laser system for deep-UV metrology

  • Author

    Hamilton, C.E. ; Doughty, C.B. ; Roper, P.M. ; Mead, R.D. ; Tidwell, S.C.

  • Author_Institution
    Aculight Corp., Bothell, WA, USA
  • Volume
    1
  • fYear
    1998
  • fDate
    1-4 Dec 1998
  • Firstpage
    322
  • Abstract
    We describe a 60-Hz all-solid-state 193-nm Nd:YAG laser system to be used for deep-UV metrology. The basic approach for generating 193 nm is to sum frequency mix the fifth harmonic of an injection-seeded Nd:YAG laser with a single-frequency 2-μm beam. A KTiOPO4 optical parametric oscillator is used
  • Keywords
    laser frequency stability; laser transitions; neodymium; optical harmonic generation; optical parametric oscillators; optical pumping; solid lasers; 193 nm; 2 mum; KTiOPO4; KTiOPO4 optical parametric oscillator; Nd:YAG laser system; YAG:Nd; YAl5O12:Nd; all solid-state single-frequency 193-nm laser system; deep-UV metrology; fifth harmonic o; frequency mix; injection-seeded Nd:YAG laser; single-frequency 2-μm beam; Diode lasers; Frequency; Laser beams; Laser stability; Metrology; Nonlinear optics; Optical harmonic generation; Optical pumping; Solid lasers; Solid state circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
  • Conference_Location
    Orlando, FL
  • Print_ISBN
    0-7803-4947-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1998.737860
  • Filename
    737860
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=331968