Title :
Measurement of MEMS displacements and frequencies using laser interferometry
Author :
Wylde, J. ; Hubbard, T.J.
Author_Institution :
Dept. of Mech. Eng., Dalhousie Univ., Halifax, NS, Canada
Abstract :
This paper will present an interferometric technique for determining the displacement and vibration of micromachined beams. A modified Michelson-Morley interferometer, which was used to measure submicron displacements of micro-devices is described. An analytical solution of the expected signal behaviour is presented. Experimental responses were found to compare well with expected responses.
Keywords :
Michelson interferometers; displacement measurement; frequency measurement; light interferometry; micromechanical devices; vibration measurement; MEMS; Michelson-Morley interferometer; displacement measurement; laser interferometry; micro-device; micromachined beam; vibration frequency measurement; Displacement measurement; Frequency measurement; Interferometry; Laser beams; Lenses; Mechanical engineering; Microelectromechanical systems; Micromechanical devices; Semiconductor device measurement; Vibration measurement;
Conference_Titel :
Electrical and Computer Engineering, 1999 IEEE Canadian Conference on
Conference_Location :
Edmonton, Alberta, Canada
Print_ISBN :
0-7803-5579-2
DOI :
10.1109/CCECE.1999.804970
