Title :
Study of the interactions of ions in silicon: Transient processes and defect production
Author :
Lazanu, S. ; Lazanu, I. ; Iordache, G. ; Stavarache, I. ; Lepadatu, A. ; Slav, A.
Author_Institution :
POBox MG-7, Nat. Inst. of Mater. Phys., Bucharest, Romania
Abstract :
The thermal spike model which takes into account both ionization and nuclear energy loss processes of the projectile as distinct electronic and atomic heat sources is used to describe transient processes induced by ions in silicon. The time and space dependencies of the lattice and electron temperatures near the projectile trajectory are calculated. The contribution of the rise in temperature on defect formation and annealing is considered.
Keywords :
annealing; crystal defects; elemental semiconductors; ion beam effects; ionisation; silicon; Si; annealing; atomic heat source; defect formation; defect production; electron temperatures; electronic heat source; ionization; lattice temperatures; nuclear energy loss process; projectile trajectory; silicon; thermal spike model; transient processes; Atomic layer deposition; Energy loss; Gold; Ionization; Silicon; Transient analysis; ion irradiation; silicon; transient processes;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650688