Silicon Micromachined Angular Rate Sensor

The principle and performance of a silicon micromachined angular rate sensor driven by rotating carrier was represented in the paper. The sensor is driven by the self-rolling of rotating carrier, therefore this allows denying rotating frame as commonly angular rate sensor, what simplifies its construction. From the experimental result, the sensor can sense the range of angular rate reach to 25 deg/s; the rate of pitching (or yawing) reach to 500 deg/s; the threshold of sensitivity has not exceeded 0.1deg /s; Scale factor non-stability on all the conditions of the tests has not exceeded plusmn 3.0% (errors determined by the electronics frequency characteristic are included).