Title :
Metamaterial millimeter wave directional coupler on silicon substrate
Author :
Sajin, Gheorghe ; Simion, Stefan ; Craciunoiu, Florea ; Bunea, Alina-Cristina ; Muller, Andrei A. ; Dinescu, Adrian
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
Abstract :
This paper presents the design and manufacturing of a metamaterial Composite Right/Left Handed (CRLH) directional coupler on silicon substrate in coplanar waveguide (CPW) configuration, with a frequency band between 26-28 GHz. The design makes use of 4 CRLH cells, cascaded and coupled two by two in order to obtain the directional coupler structure. The device was processed on a 500μm thick silicon substrate with a Au/Cr metallization with the purpose of easy integration in more complex millimeter wave integrated circuits. The measurement of working frequency, reflection loss and isolation of the coupler validates the calculated values of these parameters.
Keywords :
MIMIC; chromium; coplanar waveguide components; gold; integrated circuit metallisation; metamaterials; millimetre wave directional couplers; Au-Cr; Si; complex millimeter wave integrated circuits; composite right-left handed directional coupler; coplanar waveguide configuration; directional coupler structure; metallization; metamaterial millimeter wave directional coupler; reflection loss; silicon substrate; size 500 mum; working frequency; Coplanar waveguides; Directional couplers; Metamaterials; Silicon; Substrates; Transmission line measurements; coplanar waveguide; directional couplers; metamaterials;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650770
